The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2009
Filed:
May. 29, 2007
Masami Ikeda, Shizuoka, JP;
Satoshi Endo, Shizuoka, JP;
Masami Ikeda, Shizuoka, JP;
Satoshi Endo, Shizuoka, JP;
NuFlare Technology, Inc., Numazu-shi, JP;
Abstract
A focusing apparatus includes a first sensor and a second sensor configured to receive an optical image of a target workpiece to be inspected and convert it photoelectrically, a first optical system configured to make the optical image be focused on the first sensor, a second optical system configured to branch the optical image from the first optical system and to make a branched optical image be focused on the second sensor, a focus detection part configured to input a first image signal photoelectrically converted by the first sensor and a second image signal photoelectrically converted by the second sensor and to detect a focus position of the optical image by using high frequency components of the first image signal and the second image signal, and a focus control part configured to control a focus of the first optical system based on the focus position detected by the focus detection part.