The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 2009

Filed:

Jul. 21, 2004
Applicants:

Daniel Alvarez, Jr., San Diego, CA (US);

Jeffrey J. Spiegelman, San Diego, CA (US);

Joshua T. Cook, Encinitas, CA (US);

Tram Doan Nguyen, Westminster, CA (US);

Daniel A. Lev, Somerville, MA (US);

Troy B. Scoggins, San Diego, CA (US);

Inventors:

Daniel Alvarez, Jr., San Diego, CA (US);

Jeffrey J. Spiegelman, San Diego, CA (US);

Joshua T. Cook, Encinitas, CA (US);

Tram Doan Nguyen, Westminster, CA (US);

Daniel A. Lev, Somerville, MA (US);

Troy B. Scoggins, San Diego, CA (US);

Assignee:

Entegris, Inc., Chaska, MN (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/38 (2006.01); B01D 53/50 (2006.01); B01D 53/56 (2006.01); B01D 53/62 (2006.01); B01D 53/72 (2006.01); C09K 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for hydride gas purification uses materials having at least one lanthanide metal or lanthanide metal oxide. The method reduces contaminants to less than 100 parts per billion (ppb), preferably 10 ppb, more preferably 1 ppb. The material can also include transition metals and transition metal oxides, rare earth elements and other metal oxides. The invention also includes materials for use in the method of the invention.


Find Patent Forward Citations

Alvarez, Jr., Daniel. (2009). Hydride gas purification for the semiconductor industry (U.S. Patent No. 7510692). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7510692

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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