The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2009
Filed:
Dec. 06, 2005
Yoshiyuki Nakao, Kawasaki, JP;
Hideki Kitada, Kawasaki, JP;
Nobuyuki Ohtsuka, Kawasaki, JP;
Noriyoshi Shimizu, Kawasaki, JP;
Yoshiyuki Nakao, Kawasaki, JP;
Hideki Kitada, Kawasaki, JP;
Nobuyuki Ohtsuka, Kawasaki, JP;
Noriyoshi Shimizu, Kawasaki, JP;
Fujitsu Microelectronics Limited, Tokyo, JP;
Abstract
An insulating film having a concave portion is formed on a semiconductor substrate. The inner surface of the concave portion and the upper surface of the insulating film are covered with an auxiliary film made of Cu alloy containing a first metal element other than Cu. A conductive member containing Cu as a main composition is deposited on the auxiliary film, the conductive member being embedded in the concave portion. Heat treatment is performed in an atmosphere containing P compound, Si compound or B compound. With this method, a content of element other than Cu in the conductive member can be reduced and a resistivity can be lowered.