The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2009
Filed:
Apr. 25, 2007
Applicants:
Jinyuan Chen, Shanghai, CN;
Gerald Yin, Shanghai, CN;
Xueyu Qian, Shanghai, CN;
Tuqiang NI, Shanghai, CN;
Hiroshi Iizuka, Shanghai, CN;
Inventors:
Jinyuan Chen, Shanghai, CN;
Gerald Yin, Shanghai, CN;
Xueyu Qian, Shanghai, CN;
Tuqiang Ni, Shanghai, CN;
Hiroshi Iizuka, Shanghai, CN;
Assignee:
Advanced Micro-Fabrication Equipment, Inc. Asia, Georgetown, Grand Cayman, KY;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
An RF power supplier is provided, that enables multiple-frequency RF power. The system uses N RF signal generators, combines the RF signals, amplify the combined signals, and then separates the amplified signal. The output of the system is then a multiple-frequency RF power. Optionally, the frequencies are switchable, so that one may select which frequencies the system outputs.