The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2009
Filed:
Apr. 05, 2004
Applicants:
Yumiko Abe, Saitama, JP;
Norio Ishikawa, Saitama, JP;
Inventors:
Yumiko Abe, Saitama, JP;
Norio Ishikawa, Saitama, JP;
Assignee:
Kanto Jangaku Kabushiki Kaisha, Chuo-Ku, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23G 1/00 (2006.01); C23G 1/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for cleaning a semiconductor substrate having a contact angle between the surface thereof and water dropped thereon of at least 70 degrees comprises contacting the semiconductor surface with a cleaning liquid composition including an aliphatic polycarboxylic acid, an organic solvent having a hydroxyl group and/or an ether group, an anionic surfactant and water.