Substrate processing apparatus and substrate processing method which performs predetermined processing on a substrate which is positioned approximately horizontally at a substrate processing position

Abstract

As a substrate transportation robot transports an unprocessed substrate W to a substrate transfer position Pinert gas ejected from a substrate floating headtoward the bottom surface of the substrate W floats up the unprocessed substrate W. Driven by an actuatorthe substrate floating headfloating up the unprocessed substrate W then moves down. Upon arrival of the unprocessed substrate W at a substrate processing position Pa bottom rim portion of the substrate W engages with support pinsand as the substrate floating headfurther moves down, the unprocessed substrate W is transferred to and mounted on the support pinsThe substrate W is thus positioned at the substrate processing position Pwhereby the bottom rim portion of the substrate W and an opposing surfaceof a spin baseare positioned close to each other and opposed against each other.