The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2009

Filed:

Mar. 12, 2004
Applicants:

Stephan Levine, Berlin, DE;

Johannes Seiwert, Berlin, DE;

Joachim Lohr, Berlin, DE;

Ulrich Brammer, Berlin, DE;

Jens Fittkau, Berlin, DE;

Inventors:

Stephan Levine, Berlin, DE;

Johannes Seiwert, Berlin, DE;

Joachim Lohr, Berlin, DE;

Ulrich Brammer, Berlin, DE;

Jens Fittkau, Berlin, DE;

Assignee:

MKS Instruments, Inc., Wilmington, MA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.


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