The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2009
Filed:
Apr. 27, 2006
Masatomo Takahashi, Mitaka, JP;
Takahiro Hokida, Mitaka, JP;
Ken Kamikariya, Mitaka, JP;
Tetsuo Hata, Mitaka, JP;
Masatomo Takahashi, Mitaka, JP;
Takahiro Hokida, Mitaka, JP;
Ken Kamikariya, Mitaka, JP;
Tetsuo Hata, Mitaka, JP;
Tokyo Seimitsu Co., Ltd., Tokyo, JP;
Abstract
A movement amount operation correction method of a prober capable of easily performing an error measurement for the movement distance. In the method, the position of a probe of a probe card is detected by a probe position detection means, the position of an electrode is detected by a wafer alignment means, the position of the probe trace is detected by bringing the electrode into contact with the probe and processing an image of a probe trace on the electrode touched by the wafer alignment means, the image of the probe trace and a probe trace mark indicating the detected position of the probe are displayed on a display device, and an operator confirms or corrects the position of the probe trace mark on the image, calculates a shift of the position of the probe trace mark from a predetermined position, and corrects a movement amount operation correction value based on the calculated shift.