The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2009
Filed:
Oct. 16, 2007
Urs Wälchli, Chur, CH;
Per Björkman, Pålsböle, FI;
Heikki Saari, Espoo, FI;
Jarkko Antila, Helsinki, FI;
Hansjakob Hanselmann, Oberschan, CH;
Martin Wüest, Malans, CH;
Urs Wälchli, Chur, CH;
Per Björkman, Pålsböle, FI;
Heikki Saari, Espoo, FI;
Jarkko Antila, Helsinki, FI;
Hansjakob Hanselmann, Oberschan, CH;
Martin Wüest, Malans, CH;
Inficon GmbH, Bad Ragaz, CH;
Abstract
A manufacturing method for a vacuum measuring cell provides first and second AlOceramic or sapphire housing bodies on opposite sides of an AlOceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fiber outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.