The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2009
Filed:
Jun. 22, 2004
Applicants:
Bernardus Hendrikus Wilhelmus Hendriks, Eindhoven, NL;
Jan Evert Van Der Werf, Waalre, NL;
Inventors:
Bernardus Hendrikus Wilhelmus Hendriks, Eindhoven, NL;
Jan Evert Van Der Werf, Waalre, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/62 (2006.01); G03F 1/00 (2006.01); G03F 7/00 (2006.01); G21K 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A holographic mask includes a plurality of pixels each imparting a calculated phase and/or amplitude change to the projection beam to provide an image that is parallel to the mask. The holographic mask is used displaced from the best object plane of the projection lens.