The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2009
Filed:
Jan. 28, 2005
Hung Chih Chen, Santa Clara, CA (US);
Shijian LI, San Jose, CA (US);
John M. White, Hayward, CA (US);
Ramin Emami, San Jose, CA (US);
Fred C. Redeker, Fremont, CA (US);
Steven M. Zuniga, Soquel, CA (US);
Ramakrishna Cheboli, Santa Clara, CA (US);
Hung Chih Chen, Santa Clara, CA (US);
Shijian Li, San Jose, CA (US);
John M. White, Hayward, CA (US);
Ramin Emami, San Jose, CA (US);
Fred C. Redeker, Fremont, CA (US);
Steven M. Zuniga, Soquel, CA (US);
Ramakrishna Cheboli, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A carrier head for chemical mechanical polishing is described. The carrier head includes a backing assembly, a housing and a damping material. The backing assembly includes a substrate support surface. The housing is connectable to a drive shaft to rotate with the drive shaft about a rotation axis. In one implementation, the damping material is in a load path between the backing assembly and the housing to reduce transmission of vibrations from the backing assembly to the housing.