The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2009
Filed:
Feb. 24, 2006
Thomas Dresel, Nuremberg, DE;
Thomas Dresel, Nuremberg, DE;
Zygo Corporation, Middlefield, CT (US);
Abstract
Interferometric methods and apparatus by which the map between pixel positions and corresponding part locations are determined in situ. The part under test, which is assumed to be a rigid body, is precisely moved from a base position to at least one other position in one to six degrees of freedom in three-dimensional space. Then, the actual displacements are obtained. The base position is defined as the position with the smallest fringe density. Measurements for the base and all subsequent positions are stored. After having collected at least one measurement for each degree of freedom under consideration, the part coordinates are calculated using the differences of the various phase maps with respect to the base position. The part coordinates are then correlated with the pixel coordinates and stored.