The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 24, 2009

Filed:

Sep. 08, 2005
Applicants:

Jean-luc Truche, Los Altos, CA (US);

Gregor T. Overney, Sunnyvale, CO (US);

William D. Fisher, San Jose, CO (US);

Richard P. Tella, Sunnyvale, CO (US);

Inventors:

Jean-Luc Truche, Los Altos, CA (US);

Gregor T. Overney, Sunnyvale, CO (US);

William D. Fisher, San Jose, CO (US);

Richard P. Tella, Sunnyvale, CO (US);

Assignee:

Agilent Technologies, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 27/00 (2006.01); H01J 27/24 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention provides an apparatus for producing an image of a global surface of an ion source sample plate that is exterior to an ion source. In general terms, the apparatus contains a sample plate for an ion source, an imaging device (e.g., a CCD or CMOS camera) and an illumination device that is configured to produce a light beam that contacts the sample plate surface to define a grazing angle between the light beam and the sample plate surface. The apparatus may be present at a location that is remote to the ion source.


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