The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2009
Filed:
Jun. 26, 2007
Ofer Du-nour, Yokne'am, IL;
Vladimir Rubinstein, Yokne'am, IL;
Ofer Du-Nour, Yokne'am, IL;
Vladimir Rubinstein, Yokne'am, IL;
Nanometrics Incorporated, Milpitas, CA (US);
Abstract
Various embodiments include a metrology tool comprising an emitter configured to emit an incident light beam at a production substrate including an ARL, a receiver configured to receive a reflected light beam from the production substrate, a spectrometer configured to determine a digital signal representing an intensity of a wavelength within the reflected light beam, and a processor configured to determine a spectrum of the reflected light beam from the digital signal, select a suppression band based on an expected wavelength representative of a portion of the ARL, and determine a property of the ARL based on a portion of the spectrum in the selected suppression band.