The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2009
Filed:
Jul. 11, 2007
Kiyotaka Chiba, Tokyo, JP;
Fumio Mase, Tokyo, JP;
Kiyotaka Chiba, Tokyo, JP;
Fumio Mase, Tokyo, JP;
Tokyo Seimitsu Co., Ltd., Tokyo, JP;
Abstract
A prober and a method for reducing errors in the contact position between a probe and an electrode without lowering throughput when conducting a test of a wafer at a high or low temperature. The prober includes a wafer chuck for holding a wafer, a movement mechanism for moving the wafer chuck, a temperature adjustment mechanism for adjusting the temperature of the wafer chuck to maintain the wafer at a predetermined temperature, an alignment mechanism for measuring a positional relationship between the electrode of the device of the wafer and the probe, a movement control section for calculating the amount of movement to touch the electrode to the probe based on the positional relationship between the electrode and the probe measured by the alignment mechanism and controlling the movement mechanism based on the calculated amount of movement and a wafer temperature sensor that detects the temperature of the wafer before it is held on the wafer chuck.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile