The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2009
Filed:
Jul. 18, 2007
Tatsuo Osaka, Isehara, JP;
Yoshikatsu Okada, Yokohama, JP;
Shigeru Yamada, Chofu, JP;
Keiji Sakai, Tokyo, JP;
Tatsuo Osaka, Isehara, JP;
Yoshikatsu Okada, Yokohama, JP;
Shigeru Yamada, Chofu, JP;
Keiji Sakai, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
In order to accurately measure a shape feature of a minute droplet arranged on a substrate by a simple method, with respect to the droplet, the substrate is perpendicularly irradiated with laser light to cause diffracted light fluxes generated during passage of the laser light through the droplet to interfere with each other, so that a diffraction pattern is obtained. The diffraction pattern formed on a screen of a detector as an image is picked up by an image pickup apparatus. The shape feature of the droplet is measured by using the resultant diffraction pattern and a refractive index of the droplet.