The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2009
Filed:
Jun. 09, 2005
Yoshitaka Hamada, Joetsu, JP;
Tsutomu Ogihara, Joetsu, JP;
Motoaki Iwabuchi, Joetsu, JP;
Takeshi Asano, Joetsu, JP;
Takafumi Ueda, Joetsu, JP;
Dirk Pfeiffer, Dobbs Ferry, NY (US);
Yoshitaka Hamada, Joetsu, JP;
Tsutomu Ogihara, Joetsu, JP;
Motoaki Iwabuchi, Joetsu, JP;
Takeshi Asano, Joetsu, JP;
Takafumi Ueda, Joetsu, JP;
Dirk Pfeiffer, Dobbs Ferry, NY (US);
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
International Business Machines Corporation, Armonk, NY (US);
Abstract
A sacrificial film-forming composition is provided comprising (A) a silicone resin which is a co-hydrolytic condensate of hydrolyzable silanes having formulae (1) and (2):X—Y—SiZ  (1)RSiZ  (2)wherein Z is a hydrolyzable group, X is a crosslinkable organofunctional group such as an unsubstituted hydroxyl group or a substituted or unsubstituted epoxy, acyloxy or acryloxy group, Y is a single bond or a divalent hydrocarbon group, R is hydrogen or a monovalent hydrocarbon group, and n is an integer of 0 to 3, the silicone resin being capable of crosslinking reaction by the crosslinkable organofunctional group in formula (1), (B) a crosslinking agent, (C) an acid generator, and (D) an organic solvent. The composition has improved storage stability, filling properties, adhesion and coating uniformity sufficient to form a sacrificial film which is effectively dissolvable in a stripping solution.