The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2009
Filed:
Dec. 18, 2006
Applicants:
Hyo-jin Yun, Anyang-si, KR;
Jae-ho Kim, Yongin-si, KR;
Young-ho Kim, Yongin-si, KR;
Boo-deuk Kim, Suwon-si, KR;
Do-young Kim, Seoul, KR;
Inventors:
Hyo-Jin Yun, Anyang-si, KR;
Jae-Ho Kim, Yongin-si, KR;
Young-Ho Kim, Yongin-si, KR;
Boo-Deuk Kim, Suwon-si, KR;
Do-Young Kim, Seoul, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C 1/73 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01); G03F 7/36 (2006.01); C07F 7/21 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed are a siloxane compound, a photoresist composition using the same, and a method of forming a pattern, wherein the siloxane compound is having a general formula: wherein R1 is a tertiary butyl group or a 1-(tert-butoxy)ethyl group, and R2 and R3 is each independently a lower alkyl group having 1 to 4 carbon atoms.