The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
Jul. 17, 2006
Applicants:
Isaac Mazor, Haifa, IL;
Boris Yokhin, Nazareth Illit, IL;
Inventors:
Isaac Mazor, Haifa, IL;
Boris Yokhin, Nazareth Illit, IL;
Assignee:
Jordan Valley Semiconductors, Ltd., Migdal Ha'emek, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for X-ray analysis of a sample includes directing a beam of X-rays to impinge on an area of a periodic feature on a surface of the sample and receiving the X-rays scattered from the surface in a reflection mode so as to detect a spectrum of diffraction in the scattered X-rays as a function of azimuth. The spectrum of diffraction is analyzed in order to determine a dimension of the feature.