The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
Jan. 19, 2006
Paul Zorabedian, Mountain View, CA (US);
Paul Zorabedian, Mountain View, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
Systems configured to provide illumination of a specimen or to inspect a specimen are provided. One system includes a light source configured to generate pulses of light at a repetition rate. The system also includes optical elements arranged in a first interferometer configuration followed by a second interferometer configuration. The optical elements are configured to quadruple the repetition rate of the pulses of light. In addition, the system includes an electro-optic phase modulator configured to receive the pulses of light from the optical elements and to alter a polarization of the pulses of light at a rate of one half the quadrupled repetition rate such that the pulses of light can be directed to the specimen as effectively continuous-wave uniformly polarized illumination.