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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7483133 B1

PDFFull Text
Date of Patent:
Jan. 27, 2009

Filed:

Mar. 11, 2005

Multiple angle of incidence spectroscopic scatterometer system

Applicants:

Noah Bareket, Saratoga, CA (US);

Haiming Wang, Fremont, CA (US);

Inventors:

Noah Bareket, Saratoga, CA (US);

Haiming Wang, Fremont, CA (US);

Assignee:

KLA-Tencor Technologies Corporation., Milpitas, CA (US);

Attorney:

Weaver Austin Villeneuve & Sampson LLP

Primary Examiner:

Gregory J Toatley, Jr

Assistant Examiner:

Gordon J Stock, Jr

Int. Cl.
CPC ...
G01J 3/28 (2006.01); G01J 3/42 (2006.01); G01J 3/427 (2006.01); G01B 11/14 (2006.01); G01B 11/04 (2006.01); G01B 11/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

Techniques for optimizing the sensitivity of spectroscopic measurement techniques with respect to certain profile variables by selecting desired measurement angles since the measurement sensitivity to each variable depends, at least in part, on the measurement angles of an incident beam. The selected desired set of measurement angles includes both an azimuth angle and a polar angle. Optimizing the sensitivity of spectroscopic measurement techniques can also reduce or eliminates measurement correlation among variable to be measured.

Find Patent Forward Citations

Bareket, Noah. (2009). Multiple angle of incidence spectroscopic scatterometer system (U.S. Patent No. 7483133). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7483133

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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