The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
May. 03, 2006
Randall S. Mundt, Pleasanton, CA (US);
Andrew Beers, Liberty Hill, TX (US);
Paul D. Macdonald, Tracy, CA (US);
Mason L. Freed, Pleasant Hill, CA (US);
Dean Hunt, Danville, CA (US);
Randall S. Mundt, Pleasanton, CA (US);
Andrew Beers, Liberty Hill, TX (US);
Paul D. MacDonald, Tracy, CA (US);
Mason L. Freed, Pleasant Hill, CA (US);
Dean Hunt, Danville, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
One or more problems related to processing workpieces using processes that involve optical radiation are presented along with solutions to one or more of the problems. One embodiment of the invention comprises a sensor apparatus for collecting optical radiation data representing one or more process conditions used for processing a workpiece. In a further embodiment, the sensor apparatus is also configured for measuring data other than optical radiation.