The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
Jul. 22, 2003
Yoshihiro Kato, Tsukui-gun, JP;
Tadashi Goto, Tsukui-gun, JP;
Hikaru Yoshitaka, Tsukui-gun, JP;
Makoto Aoki, Tsukui-gun, JP;
Yoshihiro Kato, Tsukui-gun, JP;
Tadashi Goto, Tsukui-gun, JP;
Hikaru Yoshitaka, Tsukui-gun, JP;
Makoto Aoki, Tsukui-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A first channel is formed in the side of a first diffusion plate which is on that side of a gas inlet tube and a recess is formed in the side which is on that side of an electrode plate. The first channel and the recess communicate with each other through a plurality of inlet ports. The first channel and the inlet ports form a gas flow passage L which leads to the recess from the gas inlet tube. As a process gas supplied from the gas inlet tube passes through the gas flow passage L, it is supplied, dispersed, to a hollow portion formed between the recess and the electrode plate.