The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2009
Filed:
Feb. 09, 2006
Arie Jeffrey Den Boef, Waalre, NL;
Wilhelmus Maria Corbeij, Eindhoven, NL;
Mircea Dusa, Campbell, CA (US);
Reinder Teun Plug, Eindhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Wilhelmus Maria Corbeij, Eindhoven, NL;
Mircea Dusa, Campbell, CA (US);
Reinder Teun Plug, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A sensor measuring properties of a substrate in which radiation is projected onto the substrate by a radiation projector that has a first part configured such that the radiation projection can project onto the substrate linearly polarized radiation oriented in a first direction and a second part configured such that the radiation projector can project onto the substrate linearly polarized radiation oriented in a second direction orthogonal to the first direction.