The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2009
Filed:
Mar. 02, 2005
Michael Van Der Veen, Eindhoven, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Jacob Fredrik Friso Klinkhamer, Delft, NL;
Martinus Hendrikus Antonius Leenders, Rotterdam, NL;
Christianus Gerardus Maria DE Mol, Son en Breugel, NL;
Hubert Adriaan Van Mierlo, Maassluis, NL;
Michael Van Der Veen, Eindhoven, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Jacob Fredrik Friso Klinkhamer, Delft, NL;
Martinus Hendrikus Antonius Leenders, Rotterdam, NL;
Christianus Gerardus Maria De Mol, Son en Breugel, NL;
Hubert Adriaan Van Mierlo, Maassluis, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The invention is directed to enabling substrate identification by comparing the measured distance between two features on an unidentified substrate with one or more stored distances. The one or more stored distances are the distances intended during the design of one or more substrates. The unidentified substrate is identified by a stored distance that corresponds to the measured distance. The two features are selected from a plurality of features that may be placed on a back side or a front side of a substrate. An optical system is provided for reading the features from the back side or a front side of the substrate.