The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2009
Filed:
May. 25, 2005
Peter Gefter, South San Francisco, CA (US);
Scott Gehlke, Berkeley, CA (US);
Alexandre Ignatenko, Hayward, CA (US);
Peter Gefter, South San Francisco, CA (US);
Scott Gehlke, Berkeley, CA (US);
Alexandre Ignatenko, Hayward, CA (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
Static neutralization of a charged object is provided by generating, in an ionizing cell or module, an ion cloud having a mix of positively and negatively charged ions, and reshaping the ion cloud by redistributing the ions into two regions of opposite polarity by using a second voltage. The second voltage creates an electrical field, which is preferably located in the vicinity of the ion cloud. The redistribution of the ions increases the effective range in which available ions may be displaced or directed towards the charged object. The electrical field redistributes ions that form the ion cloud. Ion redistribution within the ion cloud occurs because ions having a polarity corresponding to the polarity of the second voltage are repelled from the electrical field, and ions having a polarity opposite from that of the electrical field are attracted to electrical field. Redistribution of the ions into two regions of opposite polarity in the ion cloud in turn reshapes the ion cloud so that a portion of the cloud corresponding to the repelled ions is displaced by ions attracted to the electrical field, thus enhancing the range in which the ions may be dispersed or directed. This manner of redistributing ions into two regions is sometimes referred to as 'ion polarization' in the disclosure herein.