The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2009
Filed:
Sep. 17, 2004
Applicants:
Teng-wang Huang, Dresden, DE;
Kristin Schupke, Weixdorf, DE;
Inventors:
Teng-Wang Huang, Dresden, DE;
Kristin Schupke, Weixdorf, DE;
Assignees:
Infineon Technologies AG, Neubiberg, DE;
Nanya Technology Corporation, Kueishan Taoyuan, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for etching Si anisotropically uses a solution containing NHF and HF.