The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2009
Filed:
Jan. 24, 2008
Teruyoshi Yao, Kawasaki, JP;
Teruyoshi Yao, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A method, wherein a plurality of first patterns are formed in an exposure region, and second patterns are formed by plural shots, with positions of alignment marks measured for said plurality of first patterns to give first positional information; relative positions of said plurality of first patterns to a first coordinate system are measured, to thereby compute first disalignments relative to the first coordinate system; second positional information is computed by subtracting the first disalignments from the first positional information; relative positions of said plural basic regions with respect to a second coordinate system are measured, to thereby compute second disalignments of the first pattern relative to the second coordinate system; third positional information is computed by subtracting the first and second disalignments from the first positional information; third disalignments of the first pattern with respect to a third coordinate system are computed; and positioning with respect to the first pattern is made when the second pattern is exposed, based on the first to third disalignments.