The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2009
Filed:
Aug. 13, 2004
Jennifer Y. Sun, Sunnyvale, CA (US);
Senh Thach, Union City, CA (US);
James Dempster, Sunnyvale, CA (US);
LI Xu, San Jose, CA (US);
Thanh N. Pham, San Jose, CA (US);
Jennifer Y. Sun, Sunnyvale, CA (US);
Senh Thach, Union City, CA (US);
James Dempster, Sunnyvale, CA (US);
Li Xu, San Jose, CA (US);
Thanh N. Pham, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Disclosed herein is a gas distribution plate for use in a gas distribution assembly for a processing chamber, where the gas distribution plate is fabricated from a solid yttrium oxide-comprising substrate, which may also include aluminum oxide. The gas distribution plate includes a plurality of through-holes, which are typically crescent-shaped. Through-holes which have been formed in the solid yttrium oxide-comprising substrate by ultrasonic drilling perform particularly well. The solid yttrium oxide-comprising substrate typically comprises at least 99.9% yttrium oxide, and has a density of at least 4.92 g/cm, a water absorbency of about 0.02% or less, and an average grain size within the range of about 10 μm to about 25 μm. Also disclosed herein are methods for fabricating and cleaning the yttrium oxide-comprising gas distribution plate.