The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2009
Filed:
Jul. 26, 2007
Shahin Zangooie, Hopewell Junction, NY (US);
Roger M. Young, Warwick, NY (US);
Lin Zhou, LaGrangeville, NY (US);
Clemente Bottini, Marlboro, NY (US);
Ronald D. Fiege, Hopewell Junction, NY (US);
Shahin Zangooie, Hopewell Junction, NY (US);
Roger M. Young, Warwick, NY (US);
Lin Zhou, LaGrangeville, NY (US);
Clemente Bottini, Marlboro, NY (US);
Ronald D. Fiege, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method, system and computer program product for determining a geometric parameter of an optical spot of a light beam are disclosed. A method comprises: providing a calibration target, the calibration target including a systematic variation in a parameter; measuring the calibration target with respect to the systematic variation using the light beam to obtain a plurality of measurements; and analyzing the measurements and the systematic variation to determine the geometric parameter of the optical spot.