The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2009
Filed:
Jun. 24, 2004
Takeshi Oono, Kudamatsu, JP;
Kenji Nakata, Hikari, JP;
Shoji Okiguchi, Kudamatsu, JP;
Tooru Ueno, Shunan, JP;
Hidehiro Oomae, Hikari, JP;
Shigeharu Minami, Kudamatsu, JP;
Yoshitaka Kai, Kudamatsu, JP;
Takeshi Oono, Kudamatsu, JP;
Kenji Nakata, Hikari, JP;
Shoji Okiguchi, Kudamatsu, JP;
Tooru Ueno, Shunan, JP;
Hidehiro Oomae, Hikari, JP;
Shigeharu Minami, Kudamatsu, JP;
Yoshitaka Kai, Kudamatsu, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A vacuum processing apparatus and method includes at least one vacuum processing chamber, at least one carriage for carrying the sample from a given cassette into and out of the vacuum processing chamber. A controller performs carriage control for carrying the sample taken out of the given cassette into the vacuum processing chamber, and for carrying the processed sample out of the vacuum processing chamber. A waiting cassette support supports a waiting cassette in which an unprocessed sample from the given cassette or a processed sample from the given cassette after vacuum processing is placed so as to prevent the processed and unprocessed sample from being mixed with each other.