The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2009
Filed:
Nov. 22, 2002
Yoshihide Suzuki, Osaka, JP;
Keiichi Sawai, Osaka, JP;
Noriyuki Saitou, Fukuoka, JP;
Masaru Miyoshi, Fukuoka, JP;
Makoto Ishikawa, Fukuoka, JP;
Yoshihide Suzuki, Osaka, JP;
Keiichi Sawai, Osaka, JP;
Noriyuki Saitou, Fukuoka, JP;
Masaru Miyoshi, Fukuoka, JP;
Makoto Ishikawa, Fukuoka, JP;
Sharp Kabushiki Kaisha, Osaka-Shi, JP;
Mitsubishi Chemical Corporation, Tokyo, JP;
Abstract
An etching liquid contains iodine, an iodine compound and alcohol as solute, and solvent such as water. The etching liquid etches a gold or gold alloy layer formed on the surface of a substrate for a semiconductor device or a liquid crystal device evenly. A plurality of gold or gold alloy columns is formed on the layer. The columns are etched scarcely by the etching liquid. The etching liquid etches the gold or gold alloy layer existing between the columns evenly. The etching liquid may further contain a surfactant.