The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2008
Filed:
Jun. 24, 2005
Eric D. Hobbs, Livermore, CA (US);
Benjamin N. Eldridge, Danville, CA (US);
Lunyu MA, San Jose, CA (US);
Gaetan L. Mathieu, Livermore, CA (US);
Steven T. Murphy, Rio Vista, CA (US);
Makarand S. Shinde, Livermore, CA (US);
Alexander H. Slocum, Bow, NH (US);
Eric D. Hobbs, Livermore, CA (US);
Benjamin N. Eldridge, Danville, CA (US);
Lunyu Ma, San Jose, CA (US);
Gaetan L. Mathieu, Livermore, CA (US);
Steven T. Murphy, Rio Vista, CA (US);
Makarand S. Shinde, Livermore, CA (US);
Alexander H. Slocum, Bow, NH (US);
FormFactor, Inc., Livermore, CA (US);
Abstract
A probe card assembly comprises multiple probe substrates attached to a mounting assembly. Each probe substrate includes a set of probes, and together, the sets of probes on each probe substrate compose an array of probes for contacting a device to be tested. Adjustment mechanisms are configured to impart forces to each probe substrate to move individually each substrate with respect to the mounting assembly. The adjustment mechanisms may translate each probe substrate in an 'x,' 'y,' and/or “z” direction and may further rotate each probe substrate about any one or more of the forgoing directions. The adjustment mechanisms may further change a shape of one or more of the probe substrates. The probes can thus be aligned and/or planarized with respect to contacts on the device to be tested.