The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2008
Filed:
Jun. 20, 2006
Applicants:
Wilhelmus Josephus Box, Ekse, BE;
Harm-jan Voorma, Zaltbommel, NL;
Olav Waldemar Vladimir Frijns, 's-Hertogenbosch, NL;
Maurice Piërre Marie Arthur Limpens, Elsloo, NL;
Inventors:
Wilhelmus Josephus Box, Ekse, BE;
Harm-Jan Voorma, Zaltbommel, NL;
Olav Waldemar Vladimir Frijns, 's-Hertogenbosch, NL;
Maurice Piërre Marie Arthur Limpens, Elsloo, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F24J 2/24 (2006.01); G03B 27/70 (2006.01); G01J 3/10 (2006.01);
U.S. Cl.
CPC ...
Abstract
A collector is disclosed that is constructed to receive radiation from a radiation source and to transmit radiation to an illumination system, the collector comprising a reflective element which is internally provided with a fluid channel.