The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7470609 B1

PDF
Full Text
Expired
Date of Patent:
Dec. 30, 2008

Filed:

Jan. 26, 2007
Applicants:

Kazumichi Tsumura, Kawasaki, JP;

Takamasa Usui, Tokyo, JP;

Inventors:

Kazumichi Tsumura, Kawasaki, JP;

Takamasa Usui, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor device including a multilevel wiring with a small interwiring capacitance is provided by comprising a wiring, a conductive film formed on an upper surface of the wiring to prevent diffusion of a wiring material, and an insulating film which is constituted of low dielectric constant insulating films stacked to form at least two layers, an interface thereof being positioned in a side face of the wiring.


Find Patent Forward Citations

Quick Actions:

Tsumura, Kazumichi. (2008). Semiconductor device and method for manufacturing the same (U.S. Patent No. 7470609). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7470609

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…