The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2008
Filed:
Jan. 10, 2005
Applicants:
Huey-chiang Liou, Fremont, CA (US);
Alexander Tregub, San Jose, CA (US);
Mansour Moinpour, San Jose, CA (US);
Inventors:
Huey-Chiang Liou, Fremont, CA (US);
Alexander Tregub, San Jose, CA (US);
Mansour Moinpour, San Jose, CA (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 1/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a formulation of a wafer cleaning brush, forming a polymer solution with a plurality of nano-scale porogens or with a synthetic pore forming agent and curing the polymer solution to form a porous polymeric material.