The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2008
Filed:
Aug. 25, 2004
Hideyuki Ohtake, Kariya, JP;
Tomoya Hirosumi, Anjo, JP;
Makoto Yoshida, Nagoya, JP;
Masayoshi Tonouchi, Mino, JP;
Hideyuki Ohtake, Kariya, JP;
Tomoya Hirosumi, Anjo, JP;
Makoto Yoshida, Nagoya, JP;
Masayoshi Tonouchi, Mino, JP;
Aisin Seiki Kabushiki Kaisha, Aichi-ken, JP;
Abstract
It comprises a voltage-application apparatusfor applying a predetermined voltage to a semiconductor device, and holding it therein; a laser apparatusfor generating a laser beamhaving a predetermined wavelength; an irradiation apparatusfor irradiating the laser beamonto the two-dimensional circuit of the semiconductor device, which is held in the applied state, so as to scan it two-dimensionally; an electromagnetic-wave detection/conversion apparatusfor detecting an electromagnetic wave, which is radiated from the laser-beam irradiation position, and converting the electromagnetic wave into an electric-field signal, which changes temporally; and phase-judgement means, to which the temporally-changing electric-field signal output from the detection/conversion apparatusis input, for judging the phase of the electric-field signal.