The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 09, 2008

Filed:

Mar. 03, 2006
Applicants:

Ali Shajii, Canton, MA (US);

Daniel Smith, North Andover, MA (US);

Inventors:

Ali Shajii, Canton, MA (US);

Daniel Smith, North Andover, MA (US);

Assignee:

MKS Instruments, Inc., Andover, MA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 1/12 (2006.01); G01F 1/50 (2006.01);
U.S. Cl.
CPC ...
Abstract

A flow verifier for verifying measurement of a flow rate of a fluid by a device includes a flow restrictor that renders the flow rate verification substantially insensitive to elements upstream of the flow restrictor. The flow verifier includes a vessel that receives a flow of the fluid from the device, and a pressure sensor that measures pressure of the fluid within the vessel. An outlet valve regulates flow of the fluid out of the vessel. The flow restrictor is located adjacent to and upstream of the vessel, along a flow path of the fluid. The flow restrictor restricts the flow of the fluid so as to induce a shock in the flow path of the fluid, and sustains the shock during a time period sufficient to render the flow rate verification substantially insensitive to the elements upstream of the flow restrictor.


Find Patent Forward Citations

Loading…