The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2008
Filed:
Mar. 27, 2006
Takashi Sato, Kanagawa, JP;
Ayako Nakano, Chiba, JP;
Takashi Sato, Kanagawa, JP;
Ayako Nakano, Chiba, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A simulator of an optical intensity distribution includes a field divider dividing an exposure field on a substrate into a first and second fields, the first field being to be directly exposed to a light incident at the maximum incident angle, the second field being prevented from being directly exposed to the light by a protrusion on the substrate, a first optical intensity calculator calculating an optical intensity of the first field by using a direct incident light component of the light, a second optical intensity calculator calculating an optical intensity of the second field by using a reflected light component of the light reflected from a sidewall of the protrusion, and a projected image simulation engine simulating an optical intensity distribution of a projected image of a mask pattern on the substrate, based on the optical intensities of the first field and the second field.