The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2008
Filed:
Jun. 29, 2001
Peter Gnauck, Reutlingen, DE;
Volker Drexel, Königsbronn, DE;
David Bate, Bucks, DE;
Eric Essers, Aalen, DE;
Peter Gnauck, Reutlingen, DE;
Volker Drexel, Königsbronn, DE;
David Bate, Bucks, DE;
Eric Essers, Aalen, DE;
Carl Zeiss NTS GmbH, Oberkochen, DE;
Abstract
A detector for scanning electron microscopes, which can be used under different pressure conditions in the specimen chamber of the electron microscope, designed for the detection of both electrons and light. For this purpose, the detector has a photodetector and a scintillator of a material transmissive for visible light connected before the photodetector. The scintillator can be provided with a coating transparent to visible light. By the application of different potentials, the detector is suitable for the detection of electrons in high vacuum and for the detection of light with high pressures in the specimen chamber.