The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2008
Filed:
Apr. 07, 2005
Applicants:
Yunsoo Kim, Daejeon, KR;
Chang-gyoun Kim, Daejeon, KR;
Young-kuk Lee, Daejeon, KR;
Taek-mo Chung, Daejeon, KR;
Ki-seok an, Daejeon, KR;
Sun-sook Lee, Daejeon, KR;
Seung-ho Yoo, Kyungki-do, KR;
Kiwhan Sung, Incheon, KR;
Inventors:
Yunsoo Kim, Daejeon, KR;
Chang-Gyoun Kim, Daejeon, KR;
Young-Kuk Lee, Daejeon, KR;
Taek-Mo Chung, Daejeon, KR;
Ki-Seok An, Daejeon, KR;
Sun-Sook Lee, Daejeon, KR;
Seung-Ho Yoo, Kyungki-do, KR;
Kiwhan Sung, Incheon, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 15/00 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A volatile nickel aminoalkoxide complex of formula (I) can form a nickel thin film having an improved quality by metal organic chemical vapor deposition (MOCVD).