The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2008
Filed:
Jun. 13, 2006
Woo-seok Shim, Seoul, KR;
Jung-hyeon Lee, Yongin-si, KR;
Young-koog Han, Seoul, KR;
Kwang-sub Yoon, Seoul, KR;
Si-hyeung Lee, Hwaseong-si, KR;
Woo-Seok Shim, Seoul, KR;
Jung-Hyeon Lee, Yongin-si, KR;
Young-Koog Han, Seoul, KR;
Kwang-Sub Yoon, Seoul, KR;
Si-Hyeung Lee, Hwaseong-si, KR;
Samsung Electronics Co., Ltd., Gyeonggi-Do, KR;
Abstract
In an optical member holder and a projection exposure apparatus having the same, a light beam radiated from a light source may be formed into light having a desired shape by selecting one of a plurality of optical elements. An optical element holder may include a support member to support the plurality of optical elements, a first driving section to move or rotate the support member to select one of the optical elements, and a second driving section to rotate the selected optical element to adjust an arrangement direction thereof. The light formed by the selected optical element may be directed through a reticle.