The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2008
Filed:
Mar. 04, 2004
Martinus Agnes Willem Cuijpers, Veldhoven, NL;
Martinus Agnes Willem Cuijpers, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A moveable object carrier is moveable in a first direction and in a second direction to be positioned in a plane. The object carrier may be moved in the first direction by a first and a second linear actuator. The first and second linear actuators are adapted to support the object carrier. Thereto the linear actuators may comprise additional bearing and the linear actuators are positioned relative to the object carrier such that no other bearing is required to prevent the object carrier from falling or tilting. The object carrier may be moved in the second direction by a third and a fourth linear actuator, which linear actuators may be adapted to support the first and the second linear actuators.