The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 25, 2008

Filed:

Jun. 28, 2005
Applicants:

Bart Buijsse, Eindhoven, NL;

Mark Theo Meuwese, Eindhoven, NL;

Maria Van Wely-dieleman, Eindhoven, NL;

Sjoerd Antonius Maria Mentink, Eindhoven, NL;

Theodorus Hubertus Josephus Bisschops, Eindhoven, NL;

Inventors:

Bart Buijsse, Eindhoven, NL;

Mark Theo Meuwese, Eindhoven, NL;

Maria Van Wely-Dieleman, Eindhoven, NL;

Sjoerd Antonius Maria Mentink, Eindhoven, NL;

Theodorus Hubertus Josephus Bisschops, Eindhoven, NL;

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 23/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention relates to an apparatus for evacuating samples. A sampleis hereby placed in a cavityof a sheetwith a smooth surface. A sole plateIs placed upon this smooth surface, whereby the smooth surfaceand the sole plateplaced thereupon together form a vacuum seal. The sole plate, upon which a vacuum columnis mounted, can be slid across the smooth surface. By sliding the sole plateover the cavity, the cavityis evacuated in several steps. In an embodiment of the invention, the vacuum columntakes the form of an ESEM (Environmental Scanning Electron Microscope). In this way, it is possible to inspect the evacuated samplewith the ESEM.


Find Patent Forward Citations

Buijsse, Bart. (2008). Apparatus for evacuating a sample (U.S. Patent No. 7456413). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7456413

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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