The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2008
Filed:
Dec. 14, 2004
Jan Evert Van Der Werf, Waalre, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Cristian-nicolae Presura, Veldhoven, NL;
Jan Evert Van Der Werf, Waalre, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Cristian-Nicolae Presura, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An inspection apparatus is disclosed having an radiation system configured to provide an radiation beam, a beamnsplitter configured to create, from the radiation beam, a first illumination beam and a second illumination beam directed to a planar reference part of a sample and a patterned part of the sample, respectively, and a beam detector configured to detect a detection beam, the detection beam comprising a recombination of radiation scattered from the planar reference part and the patterned part.