The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2008
Filed:
Apr. 07, 2006
Marcel François Heertjes, Best, NL;
Yin Tim Tso, Eindhoven, NL;
Ramidin Izair Kamidi, Eindhoven, NL;
Dennis Andreas Petrus Hubertina Houben, Maastricht, NL;
Marcel François Heertjes, Best, NL;
Yin Tim Tso, Eindhoven, NL;
Ramidin Izair Kamidi, Eindhoven, NL;
Dennis Andreas Petrus Hubertina Houben, Maastricht, NL;
ASML Netherlands B.V., Veldhoven, NL;
Koninklijke Philips Electronics, Eindhoven, NL;
Abstract
In a method for controlling a positioning device, the positioning device has a stator and mover, the mover being movable relative to the stator; a position sensor configured to generate a position signal indicative of a position of the mover relative to the stator; a controller configured to receive the position signal, compare it to a setpoint signal to obtain an error signal, and generate a mover control signal on the basis of a signal component of the position signal, the controller having a variable gain. The positioning device, including the position sensor and the controller, defines a control loop. For error signals having a magnitude in a predefined range, the gain is selectively set to a value higher than a value for error signals having a magnitude outside the range.