The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2008
Filed:
Aug. 18, 2005
Yoshihisa Iba, Kawasaki, JP;
Yoshihisa Iba, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
When a via-holeand an interconnection trenchare formed in an interconnection filmsby using as a mask a hard maskcovering the region except via-hole forming region, and a hard maskcovering the region except an interconnection trench forming region, the hard maskis isotropically etched to expose the upper surface of the inter-layer insulating filmat a periphery of the via-hole forming region and leave the hard maskin the interconnection trench forming region except the periphery, and then the hard maskand the insulating filmsare anisotropically etched, whereby the via-holehaving increased-width portionat the upper part, and the interconnection trenchconnected to the via-holeat the increased-width portionsare formed.