The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2008
Filed:
Jan. 12, 2005
Applicants:
Arjen Boogaard, Deventer, NL;
Timotheus Franciscus Sengers, s-Hertogenbosch, NL;
Wilhelmus Sebastianus Marcus Maria Ketelaars, Eindhoven, NL;
Carolus Ida Maria Antonius Spee, Helmond, NL;
Inventors:
Arjen Boogaard, Deventer, NL;
Timotheus Franciscus Sengers, s-Hertogenbosch, NL;
Wilhelmus Sebastianus Marcus Maria Ketelaars, Eindhoven, NL;
Carolus Ida Maria Antonius Spee, Helmond, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/52 (2006.01);
U.S. Cl.
CPC ...
Abstract
A coating for sensors and/or parts of an exposure apparatus, for example a sensor on a substrate table of a lithography apparatus, include a semiconductor, a photocatalyst, and/or a metal oxide.