The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2008
Filed:
Jun. 02, 2004
Srikanteswara Dakshina-murthy, Wappingers Falls, NY (US);
Bhanwar Singh, Morgan Hill, CA (US);
Ramkumar Subramanian, Sunnyvale, CA (US);
Khoi A. Phan, San Jose, CA (US);
Srikanteswara Dakshina-Murthy, Wappingers Falls, NY (US);
Bhanwar Singh, Morgan Hill, CA (US);
Ramkumar Subramanian, Sunnyvale, CA (US);
Khoi A. Phan, San Jose, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
The present invention relates generally to photolithographic systems and methods, and more particularly to systems and methodologies that facilitate compensating for retrograde feature profiles on an imprint mask. An aspect of the invention generates feedback information that facilitates control of imprint mask feature profile via employing a scatterometry system to detect retrograde feature profiles, and mitigating the retrograde profiles via a spacer etchback procedure.