The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 11, 2008

Filed:

Dec. 03, 2003
Applicants:

Andreas Frommeyer, Aalen, DE;

G Fraser Morrison, Aalen, DE;

Wolfgang Keller, Erbach, DE;

Yim-bun Patrick Kwan, Aalen, DE;

Harald Kirchner, Munich, DE;

Willi Heintel, Aalen, DE;

Inventors:

Andreas Frommeyer, Aalen, DE;

G Fraser Morrison, Aalen, DE;

Wolfgang Keller, Erbach, DE;

Yim-Bun Patrick Kwan, Aalen, DE;

Harald Kirchner, Munich, DE;

Willi Heintel, Aalen, DE;

Assignee:

Carl Zeiss SMT AG, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/08 (2006.01); G02B 7/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

An optical subassembly with an optical element, for example a mirror element (), has an optical surface () and bearing points () arranged on the circumference. The optical element () is connected to a mount () at the bearing points () via connecting elements (). Stress-decoupling cutouts, for example curved slots (), are provided between the optical surface () and the bearing points ().


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